英***HHV Auto306 科研工作者和電子顯微學***的多功能鍍膜設備
HHV Auto306是***種多功能的緊湊型鍍膜設備，設計用于滿足科研工作者和電子顯微學***的需求。Auto306可配備各種真空系統(tǒng)、真空腔室和標準化工藝附件，提供***系列實驗技術以滿足現(xiàn)代化實驗室的需要。
Auto306可選擇配置鐘罩式玻璃腔室、圓柱形玻璃腔室，也可以配置通用的FL400前開門式不銹鋼箱式腔室。FL400腔室具有額外的高度與寬度，適用于安裝較多的工藝附件。
客戶可選擇的模塊化工藝附件，包括熱阻蒸發(fā)源及其控制電源、電子束蒸發(fā)源、遮擋板、基片夾具以及膜厚監(jiān)控儀等。
真空系統(tǒng)由觸屏PLC控制和監(jiān)控，易于操作；高真空泵選擇包括擴散泵、渦輪分子泵、冷凝泵，并使用油封或干式泵作為支持泵。集成的具有備用電池的高真空閥門可在意外情況時保護泵和樣品。
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HHV Auto306 is a multifunctional compact coating device designed to meet the needs of researchers ａnd electron microbiologists.Auto306 can be equipped with a variety of vacuum systems, vacuum Chambers ａnd standardized process accessories, providing a range of experimental technologies to meet the needs of modern laboratories.
Auto306 can be equipped with bell jar glass chamber, cylindrical glass chamber or universal FL400 front door stainless steel box chamber.The FL400 chamber has extra height ａnd width, suitable for mounting more process accessories.
Customers can choose modular process accessories, including thermal resistance evaporation source ａnd its control power, electron beam evaporation source, shielding plate, substrate jig ａnd film thickness monitor.
The vacuum system is controlled ａnd monitored by touch screen PLC, which is easy to operate.High vacuum pump options include diffusion pumps, turbo molecular pumps, condensing pumps, ａnd use oil seals or dry pumps as support pumps.Integrated high vacuum valves with spare batteries protect pumps ａnd samples in case of accidents.
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